Keysight (Agilent) B1500A

Semiconductor Analyser (with B1517A x4)

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The Keysight B1500A (Agilent) Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, Microsoft ® Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Keysight B1500A (Agilent) can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI measurement).

Features and benefits of the Keysight B1500A (Agilent) include:

Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution
Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.
Optional, integrated capacitance module supports CV measurements up to 5 MHz
Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability
Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode
Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and +/- 40 V (80 V peak-to-peak) output.
Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.
10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.
A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft ® Windows ® GUI features
Key specifications of the Keysight B1500A (Agilent) Semiconductor Device Analyzer include:

General Features
PC-based instrument with Windows ® XP Professional OS
Single-box solution for current-voltage (IV), capacitance-voltage (CV), pulse generation, fast IV, and time-domain measurement.
Ten module slots for source monitor units (SMUs) and other module types (MFCMU, HV-SPGU and WGFMU) *
Offline data analysis and application test development via Desktop EasyEXPERT software
Measurement Capabilities
Supports current-voltage (IV) measurement to 0.1fA and 0.5µV
Supports both quasi-static and medium-frequency capacitance-voltage (CV) measurement ]
Supports accurate fast IV and time-domain measurement for a wide range of applications such as pulsed IV, NBTI and RTS measurement.
Supports high voltage pulse generation (up to ±40 V) for high power and memory device testing.

Module Selection Guide:

Module Main SlotsSpecification
B1510A HPSMU2Up to 200V, 1A force. 10fA current resolution
B1511A MPSMU1Up to 100V, 100mA force, 10fA current resolution
B1517A HRSMU1Up to 100V, 100mA force, 1fA current resolution
E5288A ASUNAUp to 100V, 100mA force, 100aA current resolutio
B1520A MFCMU11kHz to 5MHz, up to 100V DC bias with SMU
B1525A HV-SPGU1Min 12.5ns pulse width, 10ns transition time, up to 40V with 3 level pu
B1530A WGFMU1Min 100ns pulse width, 10V peak-to-peak output, 5ns current or voltage measurement sampling speed



Accessory Keysight (Agilent) B1500A