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Keysight (Agilent)

Keysight (Agilent) 5517C

Two-frequency HeNe laser Laser Type
632.8 nm Wavelength
±0.02 ppm over 1 hour, ±0.1 ppm over 1 year Frequency Stability
Minimum 0.4 mW Output Power
Approximately 30 minutes for full specification compliance Warm-Up Time
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Attribute Value
Laser Type Two-frequency HeNe laser
Wavelength 632.8 nm
Frequency Stability ±0.02 ppm over 1 hour, ±0.1 ppm over 1 year
Output Power Minimum 0.4 mW
Warm-Up Time Approximately 30 minutes for full specification compliance
Beam Diameter Approximately 6 mm (1/e²)
Operating Temperature 10°C to 35°C (50°F to 95°F)
Power Requirements 100–240 VAC, 50/60 Hz, 75 W maximum
Dimensions (W x H x D) 425 mm x 133 mm x 425 mm (16.7 in x 5.25 in x 16.7 in)
Weight Approximately 9.5 kg (21 lb)
Keysight Technologies 5517C Options:
  • 5517C - 003 - 3 mm beam diameter for use with the Agilent 10719A and 10721A differential interferometers and 10737L/R compact three-axis interferometers
  • 5517C - 009 - 9 mm beam diameter for use with the 10735A and 10736A three-axis interferometers
Calibration Form Keysight (Agilent) 5517C

Repair Form Keysight (Agilent) 5517C
Maximum file size: 40MB

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Model5517C

The Keysight (Agilent) 5517C laser interferometer is engineered for high-velocity motion systems like semiconductor lithography and flat panel applications, supporting speeds up to 711 mm/s with linear optics. It features a reference frequency of 2.4 to 3.0 MHz, 3.4 kg weight, and a 90-minute warm-up. The beam has multiple diameter options (6 mm standard, 9 mm with Option 009) and up to 1 mW output power.

It offers advanced capability with Options 003, H03, H05, and H07, supporting varied output power needs and angular measurements in multi-axis systems, ideal for complex metrology setups.

Testwall can supply the used Keysight (Agilent) 5517C, fully tested. With expert support and global delivery, Testwall ensures high-performance instrumentation with unmatched reliability and service quality. Please contact us directly if you need calibration or repair of the Keysight (Agilent) 5517C.

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