Keithley
Keithley 4210-CVU
Capacitance Voltage Unit (CVU)
1 kHz to 10 MHz Frequency Range
Cp, Cs, Lp, Ls, Rs, Rp, |Z|, |Y|, D, Q, θ, G, B Measurement Parameters
10 mVrms to 100 mVrms AC Voltage Range
–30 V to +30 V DC Voltage Bias Range
1 fF to 100 mF Capacitance Measurement Range

| Attribute | Value |
|---|---|
| Frequency Range | 1 kHz to 10 MHz |
| Measurement Parameters | Cp, Cs, Lp, Ls, Rs, Rp, |Z|, |Y|, D, Q, θ, G, B |
| AC Voltage Range | 10 mVrms to 100 mVrms |
| DC Voltage Bias Range | –30 V to +30 V |
| Capacitance Measurement Range | 1 fF to 100 mF |
| Basic Capacitance Accuracy | 0.1% |
| Interface/Compatibility | Designed for use with Keithley 4200A-SCS Parameter Analyzer |
| Form Factor | Plug-in module card for 4200A-SCS mainframe |
| DC Current Bias | Supported via external SMU integration within 4200A-SCS system |
| Primary Applications | Semiconductor C-V characterization, oxide thickness, doping profiles, MOS device testing |
Keithley 4210-CVU Options:
- 4210-CVU - 4200-CVU-Power - C-V Power Package (±200V DC bias, 100mA or 300mA, 2-wire SMA with BNC adapters, typical Cp accuracy 1.0% @ 1MHz)
- 4200-SCS - 4200-PA - Remote PreAmp module (extends low current measurement capability of any SMU to 0.1fA resolution)
- 4200-SCS - 4210-SMU - High Power Source-Measure Unit (210V, 1A, 20W)
- 4200-SCS - 4200-SMU - Medium Power Source-Measure Unit (210V, 100mA, 2W)
- 4200-SCS - 4225-PMU - Ultra-Fast I-V Module (dual-channel, pulse widths from 60ns to DC, up to 200 MS/s)
- 4200-SCS - 4225-RPM - Remote Amplifier/Switch (optional accessory for 4225-PMU, adds lower current ranges and switching capability)
- 4200-SCS - 4220-PGU - Dual-Channel Pulse Generator (up to 40V, down to 20ns pulse width, ARB and Segment ARB sweeps)
- 4200-SCS - 4200-SCP2 - 1.25GS Dual-Channel Oscilloscope Card (8-bit, up to 2.5 GS/s)
- 4200-SCS - 4200-SCP2HR - 200MS Dual-Channel Oscilloscope Card (16-bit, up to 400 MS/s)
- 4200-SCS - 4200-SCP2-ACC - Optional Scope Probe (70MHz bandwidth for SCP2, 15MHz for SCP2HR, 1x attenuation, 1m, BNC)
- 4200-SCS - 4200-BTI-A - Ultra-Fast NBTI/PBTI Option package (includes 4225-PMU, two 4225-RPMs, ACS software, Ultra-Fast BTI Test Project Module, and cabling)
- 4200-SCS - 4200-COMPILER - Optional compiler required for KULT custom algorithm integration
| Model | 4210-CVU |
|---|
The Keithley 4210-CVU is an integrated capacitance-voltage (C-V) instrument enabling high-precision measurements from femtofarads to microfarads at 1kHz to 10MHz. It includes diagnostic tools to validate C-V results effectively.
This system supports linear, C-f, and C-t sweeps with up to 4096 data points and allows custom test configurations in the 4200-SCS open environment.
Testwall can supply the used Keithley 4210-CVU, fully tested. With expert support and global delivery, Testwall ensures high-performance instrumentation with unmatched reliability and service quality. Please contact us directly if you need calibration or repair of the Keithley 4210-CVU.





